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What are the micro-nano foundry MEMS components?

Newstime: 2020-07-13 17:50:51

Micro-nano foundry is developed with the development of MEMS, and MEMS is developed with the micromachining of semiconductor integrated circuits. At present, micro-nano foundry is mainly used in microfluidic chips and other fields to integrate chips in the technical process of biochemical laboratories.

 

The MEMS involved in micro-nano foundry mainly includes micro-mechanisms, micro-sensors, micro-actuators and corresponding processing circuits. It is developed on the basis of merging a variety of micro-processing technologies and applying new results of modern information technology. High-tech frontier disciplines.

 

MEMS integrates many micron-level processing technologies. Its technological development has opened up a new technical field and industry. Micro sensors, micro actuators, micro components, micro mechanical optical devices, vacuum microelectronic devices, Power electronic devices have very broad application prospects in aviation, aerospace, automobiles, biomedicine, environmental monitoring, military, and almost all fields that people come into contact with. MEMS technology is developing into a huge industry. The current leading products in the MEMS market are pressure accelerometers, sensors, ink nozzles, micro gyroscopes, and hard disk drive heads.

 

The characteristic of micro-nano foundry is the processing technology carried out in the microscopic field. Compared with traditional mechanical processing, the size of the MEMS process is smaller and more microscopic, some are only a few microns, and the thickness is even smaller. They use silicon and Si-based materials, and adopt generation technology similar to integrated circuits (IC), which can make large-scale use of mature technologies and processes in IC production for mass and low-cost production, making the cost-effectiveness relative to traditional "mechanical" Manufacturing technology has been greatly improved.

 

A complete MEMS is an integrated micro device system composed of micro sensors, micro actuators, signal processing and control circuits, communication interfaces and power supplies. Its main purpose is to centralize the acquisition, processing and execution of information to form a multi-functional micro-system and integrate it into a large-scale system, thereby improving the level of automation and intelligence.

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