Cantilever beam is a kind of device with fixed support at one end and free end at the other end, which is widely used in gas sensors and chemical sensors because of its high sensitivity, accuracy and stability, etc. The design and process maturity of cantilever beam directly affect its performance. YW MEMS can provide customers with customized cantilever beam design and processing services by virtue of its rich design and processing experience.

Using the resonant frequency or phase parameters of the suspension beam to measure physical quantities such as pressure, vacuum, acceleration, etc.

Processing line width: hundred nanometers - hundred microns

Process materials: silicon, SOI, silicon nitride

Suspension beam type: electrostatic driven, heated, electrically charged